By Duane W., Mazumder K. C.
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Additional info for Absorption of Short X-Rays by Aluminium and Copper
Front-end silicon process complexity and cost have been traded for back-end testing and packaging costs, which make up a large fraction of the overall product costs. There is no clear application boundary for multichip system partitioning compared to single-chip integration. , 2004]. Monolithically integrated transducer technologies have advantages in approaching the fundamental sensing performance limitations for many applications by mitigating inter-chip parasitics associated with multichip integration.
1(b) on a leadframe prior to final assembly, is comprised of a two-chip co-packaged system in a dual in-line plastic package. The sensor die, capped with a hermetically sealed silicon cap, is wire bonded to the adjacent integrated circuit control die. Low-stress adhesive and coating materials are used to minimize mechanical coupling of the sensor die to the metal leadframe and the plastic injection molding materials and to minimize system offsets. 7, is produced using surface micromachining in polysilicon to form a suspended polysilicon lateral double-sided capacitive structure.
One degree of freedom is utilized for the excitation of the vibratory motion, and the second degree of freedom orthogonal to the first is required for sensing. This requirement couples tightly into the technology choice for rotational inertial sensors, because the axis of sensitivity defines which mechanical degrees of freedom are required to sense it. For example, a very thick high aspect ratio technology — as is possible with direct wafer bonded structures — might not be the most suitable for a device that is required to move out of the plane of the wafer.
Absorption of Short X-Rays by Aluminium and Copper by Duane W., Mazumder K. C.