By Tetsuro Seiyama
The themes selected for this moment quantity were rigorously chosen by way of the foreign editorial board to hide new, very important development during this fast-developing box. With contributions from many in demand researchers operating on the frontiers of the chemical sensor box, the booklet offers updated details and concept to all readers
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Extra info for Chemical Sensor Technology. Volume 2
2nd Int. Meeting on Chemical Sensors, Bordeaux, p. 247 (1986). F. Nuscheler, Proc. 2nd Int. Meeting on Chemical Sensors, Bordeaux, p. 235 (1986). V. Demarne, A. Grisel, Proc. 4th Int. Conf. on Solid-State Sensors and Actuators, Japan, 605-609, June 1987. S. C. Chang, D. B. Hicks, Proc. Transducers'85 IEEE, CH 2127-9, p. 381 (1985). G. Beensh-Marchwicka, L. Krol-Stehievska, A. Misink, Thin Solid Films, 11, 215 (1984). K. Ε. Petersen, Proc. IEEE, Vol. 70, n°5, 420-457, May 1982. Fabrication of Integrated Thin Film Semiconductor Gas Sensors A.
27. K. Murakami, D . - B . Ye, T. Yamamoto, Sensors and Actuator, 13, 315 (1988). 28. K. Dobos, M. Armgarth, G. Zimmer, I. Lundström, IEEE Trans. Electron. Devices, ED-31, 508 (1984). 29. M. Armgarth C. Nylander, IEEE Electron. Device Letts. , EDL-3, 12, 384 (1982). 30. -Y. Choi, K. Takahashi, T. Matsuo, IEEE Electron. Device Letts. , EDL-5, 1, 14 (1984). 31. Z. Li, S. J. Fonash, unpublished. References 57 packaging approaches. On the other hand the new materials used as sensitive films will become part of reliable standard processes only after good reproducibility is obtained.
31) Considerable effort has been directed toward solving those instability problems in recent years. 30) More research, however, is needed in order to completely understand and solve device instability problems. ACKNOWLEDGMENTS The authors would like to thank B. A. Kponou for her patience and hard work in preparing this manuscript. This research was supported in part by the U. S. Department of Energy Contract No. DE-AC02-76CH00016. REFERENCES 1. 2. 3. 4. 5. 6. 7. 8. 9. 10. 11. 12. 13. 14. 15. 16.
Chemical Sensor Technology. Volume 2 by Tetsuro Seiyama